IeMRC Flagship Research Project
The term Smart Microsystem refers to micro and nano-scale devices that combine electronic integrated circuits with additional, non-electronic components on a single substrate; thereby providing additional functionality. Such microsystems can be sub-divided into a myriad of application groups, including chemical, biological, optical, mechanical, electromagnetic and fluidic.
The substrates on which Smart Microystems are fabricated are predominantly CMOS silicon but may also include compound semiconductors, glass, sapphire and flexible polymers. The sizes of the substrates could be anywhere from 200mm diameter wafers down to millimetre scale chips.
This Flagship Smart Microystems research team will focus on the development of integrative manufacturing techniques and the employment of novel materials to create a portfolio of innovative multifunctional microsystems.
EPSRC recently awarded the IIS £1.5M to undertake R&D with 14 industrial partners to develop smart microsystems.